No.10（2015）9.Potential for improved tribological property by surface texturing control of hydrogenated DLC film using MSE processing

Yuuki Tokuta, Masahiro Kawaguchi, Hideo Hayashi, Sadayuki Watanabe, Shinya Sasaki

Diamond-like carbon (DLC) films exhibit excellent tribological properties such as high mechanical hardness, high wear resistance and low friction. DLC films have amorphous structures that are generally composed of sp² and sp³ hybridized orbital carbons as main component that bring about the extraordinary tribological properties. Depending on the deposition method and process conditions, DLC films can take various structures. There are many studies about optimized film structures to reduce friction coefficient. On the other hand the discussion about the relationship between surface topography (roughness and waviness) and tribological properties of DLC films is not enough. In this research, we focus on the effect of surface topography to achieve lower friction coefficient of hydrogenated DLC films, and discuss the roles of surface topography on the tribological properties.

Keywords
Tribology, MSE, DLC film, Surface topography, Friction

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