No.10（2015）2.Evaluation of electrical properties of dielectric and semiconductor materials using continuous-wave terahertz radiation

Kouichi Tokita, Yuichi Ota

  Terahertz (THz) radiation has the penetration properties of radio wave and straight running properties of light together. It is known that THz wave penetrates ceramics, plastics and papers. In general, evaluation of electrical properties of materials is essential to product development. It is expected that the THz spectroscopy will be a powerful tool for non-contact measuring of electrical properties, because THz wave penetrates dielectric and semiconductor materials used for electric devices and integrated circuits (IC).
  In this study, the electrical properties of dielectric and semiconductor materials were evaluated using the continuous-wave THz radiation.

Keywords
Terahertz, Continuous wave, Electrical properties

Back to Contents